Rohde & Schwarz now offers a solution to fully characterize the RF performance of wafer-level devices. The solution combines the powerful R&S ZNA vector network analyzer from Rohde & Schwarz with the market-leading probe systems from FormFactor. From now on, semiconductor manufacturers can perform reliable and repeatable characterizations of wafer components during the development phase, product qualification and in production.
The main objective in the development of RF frontends for 5G is to guarantee the necessary RF performance for frequency coverage and output power, while optimizing energy efficiency. An important phase of this process is verification of the RF design. To gain insight into RF performance and characteristics as soon as possible, it is most practical to analyze them at the wafer level. Characterizing a device at the wafer level requires a measurement system that includes a vector network analyzer, a probe station, RF probes, cables or adapters, a specific calibration method, and calibration substrates for the application or object. concrete examined.
To perform these essential measurements, Rohde & Schwarz relies on the R&S ZNA high-end vector network analyzer, which characterizes all RF qualification parameters at the coaxial and waveguide level, as well as frequency converters for applications above 67 GHz. FormFactor is responsible for establishing device-on-wafer contact with manual, semi-automatic, and fully automatic probing systems, including thermal monitoring, high-frequency probes, probe positioners, and calibration tools. Calibration of the entire test system, including the R&S ZNA, is performed entirely using FormFactor's WinCal XE calibration software.
Thanks to the fully calibrated test system, the user can access all the measurement functions of the R&S ZNA. The generic tests of S parameters allow to characterize filters and active components, but distortion, gain and intermodulation tests can also be carried out to qualify power amplifiers. Another typical application of this combined solution is frequency conversion measurements in mixers with phase characterization across the entire bandwidth of the device. The fully calibrated system also allows the analyzer to directly receive all results without post-processing, as the calibration data is used immediately on the analyzer. Rohde & Schwarz frequency converters open up frequencies below THz, such as the D-band, currently under investigation for 6G. The converters are integrated into the sounding station to ensure that the cabling is as short as possible between the converter and the probe tip, thus avoiding loss while achieving optimum dynamic range.
